Comparative Investigation of the Mechanical and Wear Properties of Multilayer Si-DLC/DLC Films

In this study, multilayer diamond-like carbon films 1 µm thick with different numbers of repetitions were deposited onto austenitic stainless steel SUS304 substrates using source gases. The influence the gas and difference in number on adhesion strength wear resistance was subsequently investigated. samples subjected to cross-sectional microstructure observations, elemental analysis by glow-discharge optical emission spectroscopy, nano-indentation tests, Rockwell indentation friction delamination tests. tests showed that prepared C2H2 harder than those CH4 gas. addition, irrespective used, film hardness improved when four layers rather two deposited. However, eight decreased. no improvement adhesiveness or varied. revealed coefficient smaller No observed increasing repetitions. distance until longer changing from for both gases but decreased extended layers. value H/E (hardness/Young’s modulus) increased various characteristics